Microscopy of semiconducting materials 1999 : proceedings of the Institute of Physics Conference held at Oxford University, 22-25 March 1999

＜図書＞
Microscopy of semiconducting materials 1999 : proceedings of the Institute of Physics Conference held at Oxford University, 22-25 March 1999

責任表示	edited by A G Cullis and R Beanland
シリーズ	Institute of Physics conference series ; no. 164
データ種別	図書
出版者	Bristol ; Philadelphia : Institute of Physics Pub.
出版年	c1999
本文言語	英語
大きさ	xviii, 756 p. : ill. : 24 cm
概要	With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor ...tudies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy techniques using different types of scanning probes, such as AFM, STM, and SCM. In addition, the book discusses a range of materials, from finished devices to partly processed materials and structures, including nanoscale wires and dots. This volume provides an authoritative reference for all academics and researchers in materials science, electrical and electronic engineering and instrumentation, and condensed matter physics. 続きを見る

状態	巻次	所蔵場所	請求記号	刷年	文庫名称	資料番号	コメント	予約・取寄	複写申込	自動書庫
		筑紫図 1B 会議録	420.8/I 57/164	1999		062212002000198		予約・取寄			予約・取寄

一般注記	Includes bibliographical references and index
著者標目	Cullis, A. G. Beanland, R.
件　名	LCSH:Semiconductors -- Congresses 全ての件名で検索 LCSH:Electron microscopy -- Congresses 全ての件名で検索
分　類	LCC:QC610.9 DC20:537.6/221
書誌ID	1001002998
ISBN	0750306505
NCID	BA46243219
巻冊次	ISBN:0750306505
登録日	2009.09.16
更新日	2009.09.16