The physics and chemistry of SiO[2] and the Si-SiO[2] interface 2

The physics and chemistry of SiO[2] and the Si-SiO[2] interface 2

フォーマット:
図書
責任表示:
edited by C. Robert Helms and Bruce E. Deal
本文言語:
英語
説明:
xvi , 503p.; 26cm
出版情報:
New York, United States. c1993. Plenum Press
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