Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

フォーマット:
図書
責任表示:
editors, C.Y. Wong, C.V. Thompson, K.N. Tu
説明:
xi, 369 p.: ill.; 24 cm
出版情報:
Pittsburgh, Pa., United States. c1988. Materials Research Society
シリーズ:
Materials Research Society symposia proceedings; v. 106
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